Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
The requirements for time-sharing a computer to control and monitor multiple experiments in a solid state physics and physical chemistry laboratory are discussed. A monitor system, which has been implemented on the IBM 1800, to control multiple spectroscopic experiments and collect their data is described. It provides flexible analog and digital input/output routines which, using a multilevel interrupt system, operate in a background mode once they have been initiated from a foreground program, and a priority queuing system to sequence these foreground programs. In addition, provision is made for the utilization of the computer on problems not associated with any connected experiment. A simplified sample application is presented. © 1968.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002