Kigook Song, Robert D. Miller, et al.
Macromolecules
System development and characterization of a low noise low offset SOI MEMS-CMOS PCB-integrated multi-chip ±4g piezoresistive accelerometer sensor comprising a coupled multi-bandwidth variable-gain amplifier block and a thermal sensitivity and offset compensation block is presented in this work. Custom design and fabrication has been carried out for both the SOI MEMS sensor and the analog front-end for high precision and operational reliability. The system is shown to have a scale factor of ∼4 mV/g and an output nonlinearity <1% of full-scale output with a cross-axis sensitivity <1%. Cyclic loading experiments exhibit distortionless operation over ∼1000,000 cycles without failure indicative of an extremely robust system. © 2014 Elsevier B.V. All rights reserved.
Kigook Song, Robert D. Miller, et al.
Macromolecules
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Imran Nasim, Melanie Weber
SCML 2024
J.C. Marinace
JES