Diffusion of boron and arsenic implants in 〈111〉 and 〈100〉 Si during rapid thermal annealing
- R. Kalish
- G.S. Oehrlein
- et al.
- 1985
- Nuclear Inst. and Methods in Physics Research, B
Publications
64 results at Nuclear Inst. and Methods in Physics Research, B
Laser sputtering. Part II. The mechanism of the sputtering of Al2O3
- Joshua E. Rothenberg
- Roger Kelly
- 1984
- Nuclear Inst. and Methods in Physics Research, B
Spectroscopic characteristics of the R' color center aggregate in LiF
- Carmen Ortiz
- Carmen N. Afonso
- et al.
- 1984
- Nuclear Inst. and Methods in Physics Research, B
Current-induced hydrogen migration and interface trap generation in aluminum-silicon dioxide-silicon capacitors
- F.J. Feigl
- R. Gale
- et al.
- 1984
- Nuclear Inst. and Methods in Physics Research, B