Microfabrication by through-mask electrochemical micromachining
- Madhav Datta
- 1997
- SPIE Micromachining and Microfabrication 1997
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
2 results at SPIE Micromachining and Microfabrication 1997
High aspect ratio etching in polymer for microactuator applications
- W.Y. Lee
- J. Gao
- et al.
- 1997
- SPIE Micromachining and Microfabrication 1997