Publications

221 results at Microelectronic Engineering

Device design issues for a high-performance technology with Si or SiGe epitaxial base
- - J.N. Burghartz
  - J.D. Cressler
  - et al.
- 1991
- Microelectronic Engineering
MOVPE on patterned substrates: a new fabrication method for nanometer structure devices
- - Yvan D. Galeuchet
  - Hugo Rothuizen
  - et al.
- 1991
- Microelectronic Engineering
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- - U. Behringer
  - W. Haug
  - et al.
- 1991
- Microelectronic Engineering
Fabrication of sub-100nm dual-gate MODFETS with enhanced performance
- - K.Y. Lee
  - K. Ismail
  - et al.
- 1991
- Microelectronic Engineering
Lithographic performance of an EL-3 system at 0.25μm groundrules
- - T. Newman
  - M.G.R. Thomson
  - et al.
- 1991
- Microelectronic Engineering
Laser photoetching of doped poly(tetrafluoroethylene), substituted-PTFE, and polyimide films
- - Hiroyuki Hiraoka
  - Sylvain Lazare
  - et al.
- 1991
- Microelectronic Engineering
A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
- - Michael G. Rosenfield
  - S. Rishton
  - et al.
- 1991
- Microelectronic Engineering
Conducting polyaniline: Removable SEM discharge layer
- - Marie Angelopoulos
  - Jane M. Shaw
  - et al.
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- - W. Zapka
  - A.C. Tam
  - et al.
- 1991
- Microelectronic Engineering
Strain relaxation in GeSi layers with uniform and graded composition
- - S.C. Jain
  - P. Balk
  - et al.
- 1991
- Microelectronic Engineering