Silicon oxidation during bilayer resist etching
- Mark A. Hartney
- Justin N. Chiang
- et al.
- 1989
- Proceedings of SPIE 1989
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3520 results for Mathematical Sciences
Second-harmonic diffraction from periodically modulated molecular monolayers
- T.F. Heinz
- T. Suzuki
- 1989
- Proceedings of SPIE 1989
A suprathreshold ferry-porter law: Implications for the measurement of display flicker
- Bernice E. Rogowitz
- 1989
- Proceedings of SPIE 1989
The role of unsteady adiabatic expansion in laser sputtering
- Roger Kelly
- 1989
- Proceedings of SPIE 1989
Laser photothermal effects for measurements and materials processing
- Andrew C. Tam
- 1989
- SPIE OE/LASE 1989
Ablation of polymers and tissue by ultraviolet lasers
- R. Srinivasan
- 1989
- Proceedings of SPIE 1989
Novolac based deep-uv resists
- Dennis R. McKean
- Scott A. Macdonald
- et al.
- 1989
- Proceedings of SPIE 1989
Metrology with an atomic force microscope
- P.C.D. Hobbs
- H.K. Wickramasinghe
- 1989
- Proceedings of SPIE 1989
Critical issues in high density magnetic and optical data storage
- Alan E. Bell
- 1989
- Proceedings of SPIE 1989
Chemical and physical aspects of multilayer resist processing
- J. Paraszczak
- E. Babich
- et al.
- 1989
- Proceedings of SPIE 1989