Electron-sheath interaction in capacitive radio-frequency plasmas
- D. Vender
- R.W. Boswell
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nucleation and growth of ultrathin Fe and Au films on Cu(100) studied by scanning tunneling microscopy
- D.D. Chambliss
- R.J. Wilson
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
An isotope approach to characterization of microwave water plasma modified polyimide surfaces
- N.J. Chou
- A.D. Marwick
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Helium plasma enhanced chemical vapor deposited oxides and nitrides: Process mechanisms and applications in advanced device structures
- A.A. Bright
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The use of secondary ion mass spectrometry to investigate copolymer enhanced adhesion between immiscible polymers
- V.R. Deline
- H.R. Brown
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Collimated magnetron sputter deposition
- S.M. Rossnagel
- D.J. Mikalsen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ballistic electron emission spectroscopy of noble metai-gap(110) interfaces
- R. Ludeke
- M. Prietsch
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Cracking and delamination of coatings
- Sinjiroo Thouless
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Studies of adhesion of metal films to polyimide
- David L. Pappas
- Jerome J. Cuomo
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Studies of the reactive ion etching of SiGe alloys
- G.S. Oehriein
- G.M.W. Kroesen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films