Chemical vapor deposition of AlxOyNz films
- V.J. Silvestri
- E.A. Irene
- et al.
- 1975
- Journal of Electronic Materials
Publications
32 results for E.A. Irene
The Effects of Trace Amounts of Water on the Thermal Oxidation of Silicon in Oxygen
- E.A. Irene
- 1974
- JES