0.026μm2 high performance Embedded DRAM in 22nm technology for server and SOC applications
- C. Pei
- G. Wang
- et al.
- 2014
- IEDM 2014
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4 results for B. Messenger
Early detection of electrical defects in deep trench capacitors using voltage contrast inspection
- Brian Donovan
- Oliver D. Patterson
- et al.
- 2013
- ASMC 2013
Methodology for trench capacitor etch optimization using voltage contrast inspection and special processing
- Oliver D. Patterson
- Xing J. Zhou
- et al.
- 2010
- ASMC 2010
Reliability investigation of NiPtSi electrical fuse with different programming mechanisms
- C. Tian
- D. Moy
- et al.
- 2007
- IIRW 2007