Dual beam laser annealing for contact resistance reduction and its impact on VLSI integrated circuit variability
- Zuoguang Liu
- Oleg Gluschenkov
- et al.
- 2017
- VLSI Technology 2017
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4 results for Yun Wang
Laser spike annealing: A novel post-porosity treatment for significant toughening of low-k organosilicates
- Willi Volksen
- Geraud Dubois
- et al.
- 2006
- IITC 2006
Laser spike annealing: A novel post-porosity treatment for toughening of low-k organosilicates
- Willi Volksen
- Geraud Dubois
- et al.
- 2006
- VMIC 2006
Mechanical enhancement of low- k organosilicates by laser spike annealing
- Willi Volksen
- Geraud Dubois
- et al.
- 2008
- JES