DOPANT INCORPORATION PROCESSES IN SILICON GROWN BY MOLECULAR BEAM EPITAXY.
- Subramanian S. Iyer
- Robert A. Metzger
- et al.
- 1983
- VLSI Science and Technology 1983
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DOPANT INCORPORATION PROCESSES IN SILICON GROWN BY MOLECULAR BEAM EPITAXY.
- Subramanian S. Iyer
- Robert A. Metzger
- et al.
- 1983
- ECS Meeting 1983