Trace-Gas Spectroscopy of Methane Using a Monolithically Integrated Silicon Photonic Chip Sensor
- Eric J. Zhang
- Yves Martin
- et al.
- 2019
- CLEO 2019
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19 results for Martin Glodde
Flip-chip III-V-to-silicon photonics interfaces for optical sensor
- Yves Martin
- Jason S. Orcutt
- et al.
- 2019
- ECTC 2019
Monolithically integrated silicon photonic chip sensor for near-infrared trace-gas spectroscopy
- Eric J. Zhang
- Yves Martin
- et al.
- 2019
- SPIE DCS 2019
Silicon Photonic Gas Sensing
- 2019
- OFC 2019
Silicon photonic integrated circuit for on-chip spectroscopic gas sensing
- Chi Xiong
- Yves Martin
- et al.
- 2019
- SPIE OPTO 2019
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- Chi-Chun Liu
- Yann Mignot
- et al.
- 2018
- SPIE Advanced Lithography 2018
Fundamentals of EUV resist-inorganic hardmask interactions
- Dario Goldfarb
- Martin Glodde
- et al.
- 2017
- SPIE Advanced Lithography 2017
Unexpected impact of RIE gases on lithographic films
- Martin Glodde
- Robert L. Bruce
- et al.
- 2017
- SPIE Advanced Lithography 2017
Acid generation efficiency: EUV photons versus photoelectrons
- Dario Goldfarb
- Ali Afzali-Ardakani
- et al.
- 2016
- SPIE Advanced Lithography 2016
Advanced wafer bonding and laser debonding
- Paul Andry
- Russell A. Budd
- et al.
- 2014
- ECTC 2014