CLEO 2019
Conference paper

Trace-Gas Spectroscopy of Methane Using a Monolithically Integrated Silicon Photonic Chip Sensor

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We present a monolithically integrated photonic sensor incorporating an on-chip 111- V laser, detector, sealed reference cell, and sensing waveguide capable of near-infrared absorption spectroscopy of methane near λ = 1651 nm. Sub-100 pprnv-Hz-1/2 sensitivities are demonstrated.