Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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Year

4 results for A. R. Hubbard

Multiple-Vt Solutions in Nanosheet Technology for High Performance and Low Power Applications
- - Ruqiang Bao
  - Reinaldo A. Vega
  - et al.
- 2019
- IEDM 2019
Material and process improvements towards sub 36nm pitch EUV single exposure
- - Karen Petrillo
  - Dave Hetzer
  - et al.
- 2019
- ANTS 2019
Driving down defect density in composite EUV patterning film stacks
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Essential edge protection techniques for successful multi-wafer stacking
- - Joshua Rubin
  - Kevin Winstel
  - et al.
- 2015
- S3S 2015