Microscale bending using pulsed and CW lasers
X. Richard Zhang, Xianfan Xu, et al.
Laser Applications in Microelectronic and Optoelectronic Manufacturing 2001
A pulsed nitrogen laser is used to induce a sharp thermal gradient in a thin film, and the infrared thermal radiation from the irradiated region is monitored from the same side as the excitation beam (i.e., single-ended detection). We show that the profile of this pulsed phqtothermal radiometry signal can be analyzed to provide the thermal diffusivity or thickness of the sample as well as information on subsurface modifications or the degree of thermal contact with a substrate. We present data for several important classes of film, including metal, polymer, and paper (e.g., in currency) and show the important features of the present technique for thin-film characterization, namely, nondestructive, fast, and remote sensing. © 1984 Optical Society of America.
X. Richard Zhang, Xianfan Xu, et al.
Laser Applications in Microelectronic and Optoelectronic Manufacturing 2001
Sze-Cheng Yang, Yin-Kang Hsieh, et al.
The Journal of Chemical Physics
Hee K. Park, Costas P. Grigoropoulos, et al.
Applied Physics Letters
Guofei Chen, Xianfan Xu, et al.
IMECE 1998