Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The flow-field and stresses, correct to the third order, are calculated for three basic problems of viscoelastic flow: the Poiseuille problem; helical flow in an annulus, and torsional flow between discs. The slow flow equations are set out in general tensor notation, then specialized to cylindrical polar coordinates and to spherical polar coordinatea. © 1964, The Society of Rheology. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989