Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A geographic information and database system (GIS/D) is a computer hardware and software system designed to collect, manage, analyze, and display spatially referenced data, and integrate it with other database information. GIS/D technology is spreading rapidly throughout the hydrologic and water related fields on a worldwide basis. This rate of spread can be expected to accelerate in the years to come as increasing populations, coupled with growing political sensitivity to "quality of life issues" result in new laws that stress orderly, integrated planning between all layers of government. Technological changes can be expected to further hasten the spread of GIS/D's. © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Liat Ein-Dor, Y. Goldschmidt, et al.
IBM J. Res. Dev
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Khaled A.S. Abdel-Ghaffar
IEEE Trans. Inf. Theory