Switchable cantilever for a time-of-flight scanning force microscope

Abstract

A switchable cantilever (SC) device for a time-of-flight scanning force microscope (TOF-SFM) was developed. The SC device was a very compact device with the capability of quasisimultaneous topographical imaging and chemical analysis. The SC based on the bimorph effect exhibited a switching speed as low as 10 ms, and turn-on field emissions were demonstrated with an extraction voltage as low as 15 V. The emission current and the TOF analysis were performed using two different types of cantilever devices with a silicon (Si) tip and a platinum (Pt)-coated Si tip.