Conference paper
High speed, lateral PIN photodiodes in silicon technologies
Jeremy D. Schaub, Steven J. Koester, et al.
SPIE IOPTO 2004
The SiCOH dielectric films were prepared using PECVD. The films were analyzed by determining their elemental composition and by FTIR with deconvolution of the absorption peaks. The analysis shows that the PECVD of tetramethylcyclotetrasiloxane (TMCTS) produces a highly crosslinked networked SiCOH film. The films deposited from mixtures of TMCTS and organic precursor incorporate hydrocarbon fragments into the films.
Jeremy D. Schaub, Steven J. Koester, et al.
SPIE IOPTO 2004
Deborah A. Neumayer, Katherine L. Saenger, et al.
MRS Proceedings 1999
Chih-Chao Yang, Fen Chen, et al.
IITC 2012
Alfred Grill
MRS Fall Meeting 1998