Conference paper
Graphene technology for RF and THz applications
Alberto Valdes-Garcia, Fengnian Xia, et al.
IMS 2013
The SiCOH dielectric films were prepared using PECVD. The films were analyzed by determining their elemental composition and by FTIR with deconvolution of the absorption peaks. The analysis shows that the PECVD of tetramethylcyclotetrasiloxane (TMCTS) produces a highly crosslinked networked SiCOH film. The films deposited from mixtures of TMCTS and organic precursor incorporate hydrocarbon fragments into the films.
Alberto Valdes-Garcia, Fengnian Xia, et al.
IMS 2013
Ph. Avouris, Yu-Ming Lin, et al.
IEDM 2010
Jeremy D. Schaub, Steven J. Koester, et al.
SPIE IOPTO 2004
Alfred Grill, Stephen M. Gates, et al.
Applied Physics Reviews