Conference paper
Structure of the silicon-oxide interface
Yuhai Tu, J. Tersoff
Thin Solid Films
Using a Monte Carlo approach, we identify low-energy structures for the (001)-oriented Si-SiO2 interface. The optimal interface structure found consists of an ordered array of Si-O-Si “bridges,” with low strain energy. This structure explains several puzzling experimental observations. © 2000 The American Physical Society.
Yuhai Tu, J. Tersoff
Thin Solid Films
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