Zhiyang He, Anand Natarajan, et al.
APS March Meeting 2023
Silicon carbide has emerged as a promising material for on-chip quantum and nonlinear nanophotonic devices. In addition to its excellent optical, electrical, and material properties, silicon carbide hosts optically active color centers and has a large intrinsic second-order nonlinear susceptibility. Here, we present a scalable, on-chip approach toward CMOS-compatible silicon-on-silicon carbide hybrid platforms via direct wafer bonding. Our optimized bonding method yields large-area, defect-free, uniform films with minimal oxide at the silicon-silicon carbide interface. By etching crystalline silicon nanophotonic waveguides and ring resonators into the silicon layer of the heterogenous film with well-established silicon fabrication methods that do not deteriorate the silicon carbide, we are able to fabricate high-quality, near-infrared resonators. This wafer scalable hybrid photonics platform could be an important step towards silicon carbide quantum technologies.
Zhiyang He, Anand Natarajan, et al.
APS March Meeting 2023
Pauline J. Ollitrault, Abhinav Kandala, et al.
PRResearch
Max Rossmannek, Fabijan Pavošević, et al.
ACS Fall 2023
Nathaniel Park
APS March Meeting 2023