Residual stress mapping with a scanning phase-measuring acoustic microscope

Abstract

A high-resolution scanning phase-measuring acoustic microscope (SPAM) has been developed, and using the acoustoelastic effect, has been used to image the near-surface residual stress field around features etched in sputtered alumina. This microscope operates at 670 MHz and has a resolution of 5-10 μm, depending upon the amount of defocus. Relative-velocity changes of sample surface waves as small as 50 parts per million are resolved. Images of the stress field at the tip of a 400-μm-wide slot etched in alumina are presented and compared with a finite element simulation. The SPAM uses an unconventional acoustic lens with an anisotropic illumination pattern which can measure anisotropic effects and map residual stress fields with several-micrometer resolution and a stress sensitivity of 1/3 MPa in an alumina film.