Limin Hu
IEEE/ACM Transactions on Networking
The present paper reviews some fundamental aspects related to the understanding of the high rate anodic dissolution processes and their influence on thin film patterning by electrochemical micromachining. The role of convective mass transport and current distribution on the surface finish and shape evolution is discussed. Several examples of the applications ofmaskless and through-mask electrochemical micromachining are presented. © 1996 by ASME.
Limin Hu
IEEE/ACM Transactions on Networking
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Chidanand Apté, Fred Damerau, et al.
ACM Transactions on Information Systems (TOIS)
John M. Boyer, Charles F. Wiecha
DocEng 2009