Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We investigate extensions of temporal logic by connectives defined by finite automata on infinite words. We consider three different logics, corresponding to three different types of acceptance conditions (finite, looping, and repeating) for the automata. It turns out, however that these logics all have the same expressive power and that their decision problems are all PSPACE-complete. We also investigate connectives defined by alternating automata and show that they do not increase the expressive power of the logic or the complexity of the decision problem. © 1994 Academic Press, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas M. Cheng
IT Professional
M.F. Cowlishaw
IBM Systems Journal
Kento Tsubouchi, Yosuke Mitsuhashi, et al.
npj Quantum Information