Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A process using a dry organic encapsulant as a boundary layer between an organic semiconductor (pentacene) and photolithographic chemicals was presented. Traditional photolithography was performed to pattern the material stack. High performance organic thin film transistors (OTFTs) made using the organic semiconductor pentcene showed mobilities of the order of 1 cm2V-1s-1. The process was found to be fully subtractive.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications