Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Patterning pentacene organic thin film transistors

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A process using a dry organic encapsulant as a boundary layer between an organic semiconductor (pentacene) and photolithographic chemicals was presented. Traditional photolithography was performed to pattern the material stack. High performance organic thin film transistors (OTFTs) made using the organic semiconductor pentcene showed mobilities of the order of 1 cm2V-1s-1. The process was found to be fully subtractive.