Patterning and characterization of large-area quantum wire arrays

Abstract

Large-area arrays of parallel quantum wires of 30-80 nm width are achieved using a combination of x-ray lithography, wet chemical etching, and low-pressure metalorganic vapor phase epitaxy. The quantum wires are characterized using low-temperature photoluminescence and magnetotransport measurements. The quantum confinement is reflected in a clear blue shift in the luminescence peak, and in deviation from the periodicity of the Shubnikov-de Haas oscillations as a function of inverse magnetic field.