Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In 2006 Lenchner and Brnnimann [14] showed that in the affine plane, given n lines, not all parallel and not all passing through a common point, there have to be at least n6 ordinary points. The present paper improves on this result to show that there must be at least 2n-37 ordinary points, except for a single arrangement of 6 lines with one ordinary point. © 2010 Elsevier B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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