Review of Scientific Instruments

Note: Micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy

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We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers. © 2012 American Institute of Physics.