Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
New basis functions and solution procedures for p‐version finite element analysis are described. They are used in a highly efficient p‐version finite element solver for linear elastostatics and dynamics, which has been used in an industrial environment for over two years. Using two sample applications it is shown that, using the techniques proposed here, p‐version finite element analysis can have a substantially lower computational cost, for given accuracy, than standard finite element methods. This makes the industrial applicability of p‐version finite element analysis much wider than is commonly believed. Copyright © 1993 John Wiley & Sons, Ltd
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics
R.A. Brualdi, A.J. Hoffman
Linear Algebra and Its Applications
A. Skumanich
SPIE OE/LASE 1992