Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
The cylindrical microdomains of a copolymer film can be used to generate an array of ordered nanoscopic pores with well-controlled size, orientation, and structure. Selective etching procedures and a characterization of samples by a quantitative analysis of the X-ray scattering along with electron and atomic force microscopies are described. The processes are outlined and are shown to be operative over a very large range in sample thickness, ranging from 40 nm up to several micrometers. The resulting nanoporous films are promising candidates as membranes with specific transport properties and as templates for electronic and magnetic nanostructured materials.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics