Publication
Review of Scientific Instruments
Paper

Modular thin film deposition system

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Abstract

A modular thin film deposition system has been designed in which several arrangements of source, substrate, and associated deposition facilities are possible. The system is compatible for use with different pumping arrangements and has been used in this laboratory in conjunction with various thin film studies. © 1971 The American Institute of Physics.

Date

04 Nov 2003

Publication

Review of Scientific Instruments

Authors

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