R. Srinivasan, Bodil Braren, et al.
CLEO 1989
Short pulses of far-ultraviolet (193 nm) laser radiation are capable of etching organic polymer films without melting the remaining sample. The mechanism proposed for this ablative photodecomposition attributes ablation to the increase in volume that accompanies the photolysis of the polymer. A model of the microscopic process is presented here. The predictions of the model include ablation without melting, a mean perpendicular ejection velocity of 1300 m/s, and an angular distribution of the ablated material which has a narrow peak normal to the surface.
R. Srinivasan, Bodil Braren, et al.
CLEO 1989
R. Srinivasan, Jose A. Ors
Journal of Organic Chemistry
R. Srinivasan
Proceedings of SPIE 1989
R. Srinivasan, Jose A. Ors
JACS