Conference paper
Maskless laser plating techniques for microelectronic materials
R.J. Von Gutfeld, M.H. Gelchinski, et al.
Proceedings of SPIE 1989
Insulating thin-film patterns have been deposited on a variety of metal surfaces using focused laser light incident on samples submerged in both electrolytic and electroless nickel solutions. Deposits occur only where the laser radiation is absorbed by the substrate. For a single scan, the patterned film can have dimensions as small as 25 nm in height, 4 μm in width. Scanning electron microscope and electrical probing measurements confirm the insulating nature of the films.
R.J. Von Gutfeld, M.H. Gelchinski, et al.
Proceedings of SPIE 1989
R.J. Von Gutfeld
Journal of Applied Physics
O.C. Wells, C.G. Bremer
Journal of Physics E: Scientific Instruments
R.J. Von Gutfeld, D.R. Vigliotti, et al.
Applied Physics Letters