R.J. Von Gutfeld, A.H. Nethercot Jr.
Journal of Applied Physics
We describe a new type of jet plating that uses a focused high-frequency sound field directed through the center of the jet. The acoustic jet results in an improved morphology for gold and copper depositions although plating rates are not enhanced. Four-point probe measurements of acoustic-jet plated copper lines show up to a 50% decrease in electrical resistivity compared to jet plated deposits.