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Publication
Journal of Physics E: Scientific Instruments
Paper
Voltage measurement in the scanning electron microscope
Abstract
Voltages have been measured in the scanning electron microscope by passing the secondary electrons through an electrostatic energy analyser between the specimen and the electron detector. Experimental results are described in which (i) some sources of image contrast are investigated and (ii) the reverse characteristic of a p-into-n diffused device is measured by a contactless method.