Publication
Journal of Physics E: Scientific Instruments
Paper

Voltage measurement in the scanning electron microscope

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Abstract

Voltages have been measured in the scanning electron microscope by passing the secondary electrons through an electrostatic energy analyser between the specimen and the electron detector. Experimental results are described in which (i) some sources of image contrast are investigated and (ii) the reverse characteristic of a p-into-n diffused device is measured by a contactless method.

Date

15 May 2002

Publication

Journal of Physics E: Scientific Instruments

Authors

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