Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Knudsen effusion studies of the sublimation of polycrystalline GeSe2 have been performed employing mass spectrometry in a temperature range of about 610–750 K and vacuum microbalance techniques in the temperature range 614–801 K and at pressures ranging from about 10−7 − 10−4 atm. The results demonstrate that GeSe2 vaporizes congruently under present experimental conditions according to the predominant reaction (1) GeSe2(s) = GeSe(g) + 1/2 Se2(g) and a minor reaction (2) GeSe2(s) = GeSe2(g). The mean values for the third law heat and second law entropy of reaction (1) based on direct mass‐loss data are ΔH°298 = 70.4 ± 2 kcal/mole and ΔS°298 = 64.7 ± 2 eu. From these the standard heat of formation and absolute entropy of GeSe2(s) were calculated to be −21.7 ± 2 kcal/mole and 24.6 ± 2 eu, respectively. Copyright © 1976 Verlag GmbH & Co. KGaA, Weinheim
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering