Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper presents a simple O(n + k) time algorithm to compute the set of k non-crossing shortest paths between k source-destination pairs of points on the boundary of a simple polygon of n vertices. Paths are allowed to overlap but are not allowed to cross in the plane. A byproduct of this result is an O(n) time algorithm to compute a balanced geodesic triangulation which is easy to implement. The algorithm extends to a simple polygon with one hole where source-destination pairs may appear on both the inner and outer boundary of the polygon. In the latter case, the goal is to compute a collection of non-crossing paths of minimum total cost. The case of a rectangular polygonal domain where source-destination pairs appear on the outer and one inner boundary12 is briefly discussed.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Igor Devetak, Andreas Winter
ISIT 2003
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009