Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Stochastic multi-stage linear programs are rarely used in practical applications due to their size and complexity. Using a general matrix to aggregate the constraints of the deterministic equivalent yields a lower bound. A similar aggregation in the dual space provides an upper bound on the optimal value of the given stochastic program. Jensen's inequality and other approximations based on aggregation are a special case of the suggested approach. The lower and upper bounds are tightened by updating the aggregating weights.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Yixiong Chen, Weichuan Fang
Engineering Analysis with Boundary Elements
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997