Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A Gorsky relaxation associated with the long-range diffusion of hydrogen has been observed for the first time in a metallic glass. The diffusion parameters for amorphous Pd80Si20 are QD=0.25 eV and D0=0.003 cm2/sec. From the characteristics of a complementary reorientation relaxation, it is concluded that the interstitial sites occupied by hydrogen possess a distinctly asymmetric character. © 1981 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Materials Research Society Symposium - Proceedings
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Physical Review B
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