Felix Holzner, Philip Paul, et al.
EMLC 2013
A new process for the microfabrication of a fully integrated electrostatic lens in silicons, in particular the design of a low-energy miniaturized electron column, is described. It is suitable for batch processing and reduces considerably the difficulties associated with lens assembly. The electrode-spacer-electrode stack comprises an epitaxial p-n-p doped layer structure in silicon, which serves as electrodes and spacers, respectively. Because this technique allows the dimensions of the lens to be reduced, and owing to a new technique to align the electrode bores, the aberration of the lens is expected to be lower than that of lenses fabricated with previously reported techniques.
Felix Holzner, Philip Paul, et al.
EMLC 2013
O. Krause, Abu Sebastian, et al.
NSTI-Nanotech 2012
Daniel Grogg, Yu Pu, et al.
SENSORS 2012
Armin Knoll, Felix Holzner, et al.
FNANO 2010