Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Tetrafluoroethylene/perfluoromethyl vinyl ether copolymer was exposed to electron beams and analyzed for structural changes and volatiles generated via infrared spectroscopy. When the copolymer is irradiated, gases are produced, mass loss is induced, and acid fluoride end groups are formed in the bulk. CF4, COF2, CO2, and CF3OCF3 are produced with G values of 0.93, 0.31, 0.055, and 0.14, respectively. The sum of the G values for gas formation, 1.43, provides an upper limit estimate for side chain cleavage. The G value for formation of acid fluoride in the bulk is 0.34 and provides a lower limit estimate for main chain scission. Hence, most of the side chain scissioning leads to reactions that do not produce acid fluoride end groups.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
David B. Mitzi
Journal of Materials Chemistry
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings