Publication
Applied Physics Letters
Paper
Detection of SiH2 in silane and disilane glow discharges by frequency modulation absorption spectroscopy
Abstract
The reactive species SiH2 has been directly observed in dc glow discharges using the technique of frequency modulation absorption spectroscopy. The spatial distribution of SiH2 in the discharge and the relative amounts of SiH2 in silane and disilane discharges have been measured.