Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We examine the degree relationship between the elements of an ideal I⊆R[x] and the elements of φ(I) where φ→R is a ring homomorphism. When R is a multivariate polynomial ring over a field, we use this relationship to show that the image of a Gröbner basis remains a Gröbner basis if we specialize all the variables but one, with no requirement on the dimension of I. As a corollary we obtain the GCD for a collection of parametric univariate polynomials. We also apply this result to solve parametric systems of polynomial equations and to reexamine the extension theorem for such systems. © 2001 Elsevier Science B.V.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Matthew A Grayson
Journal of Complexity
A. Skumanich
SPIE OE/LASE 1992