Conference paper
Atomic layer deposition of materials for phase-change memories
Markku Leskelä, Viljami Pore, et al.
ECS Meeting 2009
The crystallization of amorphous Ge2Sb2Te5 (GST) doped with nitrogen is studied with pulsed laser heating. The crystallization time of sputter-deposited films is increased by doping by as much as 100× for nitrogen concentrations of the order of 12 at. % in as-deposited amorphous films. Suppression of the formation of critical crystal nuclei is found to be responsible. The crystallization of melt-quenched amorphous material is also slowed by doping but less dramatically. © 2009 American Institute of Physics.
Markku Leskelä, Viljami Pore, et al.
ECS Meeting 2009
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