B. Kalkan, T.G. Edwards, et al.
Journal of Chemical Physics
The crystallization of amorphous Ge2Sb2Te5 (GST) doped with nitrogen is studied with pulsed laser heating. The crystallization time of sputter-deposited films is increased by doping by as much as 100× for nitrogen concentrations of the order of 12 at. % in as-deposited amorphous films. Suppression of the formation of critical crystal nuclei is found to be responsible. The crystallization of melt-quenched amorphous material is also slowed by doping but less dramatically. © 2009 American Institute of Physics.
B. Kalkan, T.G. Edwards, et al.
Journal of Chemical Physics
Kristof Darmawikarta, Bong-Sub Lee, et al.
Journal of Applied Physics
William Hinsberg, Gregory Wallraff, et al.
Microlithography 2004
Xin Jiang, Roger Wang, et al.
IBM J. Res. Dev