SPIE Advanced Lithography 2007
Conference paper

Contact angles & structure/surface property relationships of immersion materials 65191Q

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Surface properties of materials are an important, even vital, consideration in immersion lithography. Many investigations have shown that sessile drop static contact angles are not entirely useful in the design of high performance immersion lithography surfaces. We have synthesized and characterized a broad family of "hydrophobic" materials and this paper will share information on the role of molecular structure on contact angles and hysteresis of these immersion materials. Insight into the relationship between structure and contact angles for future immersion materials will be presented.