Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We consider the scenario in which a set of sources generates messages in a network and a receiver node demands an arbitrary linear function of these messages. We formulate an algebraic test to determine whether an arbitrary network can compute linear functions using linear codes. We identify a class of linear functions that can be computed using linear codes in every network that satisfies a natural cut-based condition. Conversely, for another class of linear functions, we show that the cut-based condition does not guarantee the existence of a linear coding solution. For linear functions over the binary field, the two classes are complements of each other. © 1963-2012 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Xiaozhu Kang, Hui Zhang, et al.
ICWS 2008
B. Wagle
EJOR
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004