Combined use of differential scanning calorimetry and cross-sectional transmission electron microscopy for characterization of thin-film reactions

Abstract

We demonstrate that the combined use of differential scanning calorimetry (DSC) and cross-sectional transmission electron microscopy (XTEM) is a powerful technique in the quantitative investigation of the nucleation and growth of metastable and equilibrium phases during thin-film interdiffusion reactions. The Various approaches and advantages of the DSC/XTEM technique in obtaining a variety of kinetic and thermodynamic data are discussed. Explosive reactions, as opposed to conventionally controlled reactions, may occur in thin films where the multilayer geometry is used. © 1991 IOP Publishing Ltd.