CMOS-Compatible Hybrid III-V/Si Photodiodes Using a Lateral Current Collection Scheme

Abstract

The CMOS-compatible front-end integration of ultra-compact lateral current collection III-V/Si photodetectors on a Silicon Photonics platform is demonstrated for the first time. The novel waveguide-coupled photodiodes show sub-nA dark current, ultra-low capacitance, a high responsivity, and data transmission at 25Gbps.