Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
An intensity analysis is made of the c(2 × 2) LEED pattern of one- to two-layer Mn films on Pd{0 0 1} to see if a theoretically-predicted antiferromagnetic structure contributes to the LEED intensities. We show that a pure magnetic structure, even if buckled, cannot fit the data. However, a mixed, strongly-buckled MnPd surface layer, with the Mn sublayer above the Pd sublayer, gives a moderately good fit. Annealing of the system produces a bulk Pd3Mn alloy with the Cu3Au structure and a buckled relaxed first atomic layer, but with the Mn sublayer now below the Pd sublayer. © 1990.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP