Publication
IRMMW-THz 2016
Conference paper

24×24 Pixel focal plane array for THz imaging applications

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Abstract

A focal plane array of 24×24 elements for imaging applications in the 0.6-1.2 THz range was fabricated in a SOI-CMOS process and post-processed with MEMS technology. The pixels are fully released antenna-coupled CMOS microbolometers, where the sensing element is a lateral diode. The chip includes a column-multiplexed readout circuit with digital calibration and analog output. The pixel responsivity and NEP were characterized with CW sources, showing high sensitivity.

Date

28 Nov 2016

Publication

IRMMW-THz 2016

Authors

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